| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a spray piping unit for an etching apparatus which is excellent in in-plane uniformity in etching treatment.SOLUTION: A spray piping unit for an etching apparatus includes a lower frame in which a plurality of spray pipes are arranged in parallel in a frame-like peripheral wall so as to be capable of axial rotation, an upper frame which is disposed over the lower frame and provided with guide pins protruding inward on a frame-like peripheral wall, a connection bracket bridged from the lower frame to the upper frame, and oscillation means for causing the lower frame and the upper frame to reciprocate in the substrate conveyance direction and the vertical/horizontal directions, respectively. The connection bracket is arranged so as to oscillate interlocking with the axial rotation of the spray pipes, and the guide pins are inserted into vertically long holes bored in the upper part of the connection bracket so as to be movable in the vertical direction.</p> |
