| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a structure for a flow sensor in which a sensor assembly is secured to a casing, the structure being capable of suppressing the characteristic change of a sensor chip.SOLUTION: A sensor assembly 14 includes: a sensor part 26 in which a sensor chip 11 is installed; and a relay part 25 connected to the sensor part 26. The replay part 25 has a first side face 30 on the top surface 16 side of the sensor chip 11 and a second side face 32 on the rear surface 17 side of the sensor chip 11. The relay part 25 further has a first convex part 31 and a second convex part 33 which are provided on both of the first side face 30 and the second side face 32 and provided at a position corresponding to the side of a through-hole 42 of a casing 40 opposite to a flow passage 41 and which are in contact with a wall face 47 of the through-hole 42. A residual stress generated in the relay part 25 hardly reaches the sensor chip 11 thanks to these first and second convex parts 31, 33.</p> |
