放射线图像检测装置及制造方法;RADIATION IMAGE DETECTING DEVICE AND MANUFACTURING METHOD THEREOF

摘要

本发明提供一种放射线图像检测装置的制造方法及其放射线图像检测装置，可容易地形成闪烁器保护膜，所述闪烁器保护膜覆盖闪烁器而不使闪烁器发生破损，并且周缘部相对于基板具有高密接性。覆盖设置于光电转换面板21上的平面状的闪烁器20的闪烁器保护膜23，藉由表面上具有凹凸形状的平面构件而与闪烁器20及光电转换面板21密接，且形成有顺沿平面构件的凹凸形状的凹凸形状。凹凸形状的凹部间的间隔S、柱状晶体20a的柱径D及周缘部23b的宽度W设为「D≦S≦W」。 This invention provides a manufacturing method of a radiation image detecting device and the radiation image detecting device that can easily form a scintillator-protecting film. The scintillator-protecting film covers the scintillator without damaging the scintillator and an edge part has a high stickness to a substrate. The scintillator-protecting film 23 covering a planar scintillator 20 disposed on a photoelectric conversion panel 21 sticks to the scintillator 20 and the photoelectric conversion panel 21 by a planar member with an uneven shape on the surface. The scintillator-protecting film 23 is formed with an uneven shape along the uneven shape of the planar member. A pitch S between concavities of the uneven shape, a column diameter D of a column crystal 20a and width W of the edge part 23b is set to be “D ≦ S ≦