基板运送装置、基板运送方法及记录有用来实行该基板运送方法的程式之记录媒体;SUBSTRATE CARRYING MECHANISM, SUBSTRATE CARRYING METHOD AND RECORDING MEDIUM STORING PROGRAM INCLUDING SET OF INSTRUCTIONS TO BE EXECUTED TO ACCOMPLISH THE SUBSTRATE CARRYING METHOD

摘要

本发明提供一种基板运送装置、基板运送方法及记录有用来实行该基板运送方法的程式之记录媒体；该基板运送装置，将于基板周缘部具有缺口之基板藉由叉部固持、运送时，可精度良好地检测基板位置之偏移量，可轻易地修正此一偏移量，且可同时确认叉部之状态并加以修正。;该基板运送装置具有：基台；固持部3A，设为自基台自由进退，固持基板W；4个以上的检测部5，分别于不同位置，检测在固持部3A以固持基板W之状态后退时，固持部3A所固持的基板W其周缘部之位置；以及控制部，依据检测部5检测出的周缘部位置之检测值，判断检测部5之任一是否检测出基板W之周缘部其设置缺口之部分WN，在判断为一个检测部5检测出设置缺口之部分WN时，依据一个检测部5以外之3个检测部5的检测值，于运送至下一处理单元时修正至处理单元的基板W之传递位置。; a substrate holding member placed on the base and capable of holding a substrate and of being advanced and retracted relative to the base; four or more detecting units respectively for detecting different parts of the edge of a substrate held by the substrate holding member when the substrate holding member holding the substrate is retracted; and a controller that determines whether or not a notch formed in the edge of the substrate has been detected by one of the detecting units, on the basis of measurements measured by the four or more detecting units and corrects an error in a transfer position where the substrate is to be transferred to the succeeding processing unit on the basis of measurement measured by the detecting units excluding the one detecting unit that has detected the notch of the substrate.