收纳容器内之环境气体管理方法;METHOD FOR MANAGING ATMOSPHERE IN STORAGE CONTAINER

摘要

本发明提供一种收纳容器内之环境气体管理方法，为具有藉由具备以开闭门5开闭之搬运口20的分隔壁2分隔之基板搬运区域S1与容器搬运区域S2，且具备如下元件之处理装置1、10中的该收纳容器内之环境气体管理方法： 容器保管架18，设置于该容器搬运区域，暂时载置藉由盖体的开闭而可密闭收纳复数片基板W之收纳容器C而使其待机； 盖体开闭机构6，设置于该开闭门，将与该搬运口之口缘部密接的该收纳容器之该盖体卸下并可将该收纳容器内以惰性气体置换； 该收纳容器内之环境气体管理方法包含如下步骤： 使用该盖体开闭机构，将收纳有未处理之该基板的该收纳容器内，以该惰性气体置换之步骤； 将内部经该惰性气体置换之该收纳容器，搬运至该容器保管架而加以载置之步骤；以及 使该收纳容器于该容器保管架待机之步骤。; a load port; a container keeping rack ; and a cover opening/closing mechanism, includes substituting the internal atmosphere of the storage container that stores non-processed substrates with the inert gas for using the cover opening/closing mechanism; transferring the storage container of which the internal atmosphere has been substituted with the inert gas, to the container keeping rack and placing and keeping the storage container on the container keeping rack; and putting the storage container on standby on the container keeping rack while maintaining the atmosphere substituted with the inert gas.