发明名称 A method for regenerating removal liquid from removal liquid waste liquid, and a regenerating apparatus
摘要 <p>A method for regenerating stipper solution from waste stipper solution, and a regenerating apparatus thereof are provided to prevent the precipitation of resist and to improve the recovery rate of the purfied stripper solution. A method for regenerating stipper solution comprises a step of removing positive type photoresist contained in the waste stipper solution and reproducing the stipper solution by adding an alkaline compound of 0.01~0.2 times mass based on the photoresist mass contained in the waste resist stipper solution generated in a manufacturing process of LCD panel.</p>
申请公布号 KR101497150(B1) 申请公布日期 2015.02.27
申请号 KR20080104730 申请日期 2008.10.24
申请人 发明人
分类号 G03F7/42 主分类号 G03F7/42
代理机构 代理人
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