发明名称 MACHINING APPARATUS
摘要 <p>The objective of the present invention is to provide a machining apparatus which can verify the machining state of a workpiece in three-dimensional way. The machining apparatus includes: a workpiece holding unit to hold a workpiece; a machining unit to machine the workpiece held by the workpiece holding unit; a moving unit to move the workpiece holding unit and the machining unit in a machining transfer direction (X axis direction); a 3D imaging mechanism to photograph the workpiece held by the workpiece holding unit in an X axis direction, a Y axis direction perpendicular to the X axis direction, and a Z axis direction perpendicular to the X axis direction and the Y axis direction to output a signal of the photographed image; a processing unit to generate a 3D image based on the image signal output from the 3D imaging mechanism; and an output unit to output the 3D image generated by the processing unit.</p>
申请公布号 KR20150020996(A) 申请公布日期 2015.02.27
申请号 KR20140100943 申请日期 2014.08.06
申请人 发明人
分类号 H01L21/301;H01L21/304;H01L21/66;H01L21/677;H04N13/02 主分类号 H01L21/301
代理机构 代理人
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