PROCESS FOR PREPARING THIN OXIDE FILMS

摘要

The invention relates to a process for preparing some ceramic films with applications in microelectronics. According to the invention, the process consists in preparing a precursor mixture as an aqueous solution of desired cation species nitrates whereto there is added citric acid as a chelating agent and polyvinyl alcohol, wherefrom, by heating, there is prepared a solution with controlled viscosity which is applied by classic methods on a desired substrate which is subjected to successive drying, pyrolysis and sintering treatments, wherefrom there result amorphous or crystallized colourless thin oxide films or multilayer films uniformly distributed over the substrate.