LITHOGRAPHIC APPARATUS,申请号KR20147035845-传众专利搜索

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法人/股东/高管

发明名称	LITHOGRAPHIC APPARATUS
摘要	A reflector includes a reflecting surface or structure provided with a cap layer formed from Silicene or a Silicene derivative. The reflector may be provided in a lithographic apparatus.
申请公布号	KR20150021061(A)	申请公布日期	2015.02.27
申请号	KR20147035845	申请日期	2013.05.08
申请人		发明人
分类号	G02B17/02;G03F1/52;G03F1/62;G03F7/20;G21K1/06	主分类号	G02B17/02
代理机构		代理人
主权项
地址

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