发明名称 PHOTOSENSITIVE COMPOSITION AND PHOTORESIST
摘要 A photosensitive composition and a photoresist are provided. The photoresist is formed by compounding a photosensitive composition. The photosensitive composition includes a binder agent, a first photomonomer, and a photo initiator. The first photomonomer has at least a lactic oligomer and at least two unsaturated acrylic functional groups, wherein the first photomonomer has an amount of about 25-95 parts by weight relative to 100 parts by weight of a solid content of the binder agent. The photoinitiator has an amount of about 0.5-15 parts by weight relative to 100 parts by weight of the solid content of the binder agent.
申请公布号 US2015056556(A1) 申请公布日期 2015.02.26
申请号 US201314141091 申请日期 2013.12.26
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 LIN Hsien-Kuang;CHEN Sue-May;JENG Jauder;LIU Yu-Lin;CHEN Su-Huey
分类号 G03F7/033 主分类号 G03F7/033
代理机构 代理人
主权项 1. A photosensitive composition, comprising: a binder agent; a first photomonomer having at least a lactic oligomer and at least two unsaturated acrylic functional groups, wherein the first photomonomer has an amount of about 25-95 parts by weight relative to 100 parts by weight of a solid content of the binder agent; and a photoinitiator, wherein the photoinitiator has an amount of about 0.5-15 parts by weight relative to 100 parts by weight of the solid content of the binder agent.
地址 Hsinchu TW