| 发明名称 |
PIEZOELECTRIC ELEMENT, LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS AND PIEZOELECTRIC DEVICE |
| 摘要 |
Provided is a piezoelectric element that has a first electrode, a piezoelectric layer provided on the first electrode, and a second electrode provided on the piezoelectric layer, an average grain size of crystal grains aligned in a planar direction within 15° from a (100) plane is less than the average grain size of the crystal grains facing a planar direction inclined by more than 15° from the (100) plane, in a case in which the crystal orientation of the piezoelectric layer is analyzed using an electron beam backscatter diffraction method (EBSD). |
| 申请公布号 |
US2015054888(A1) |
申请公布日期 |
2015.02.26 |
| 申请号 |
US201414464170 |
申请日期 |
2014.08.20 |
| 申请人 |
SEIKO EPSON CORPORATION |
发明人 |
SAKAI Tomohiro;KATO Tatsushi |
| 分类号 |
H01L41/187;B41J2/14;H01L41/047 |
主分类号 |
H01L41/187 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A piezoelectric element comprising:
a first electrode; a piezoelectric layer provided on the first electrode; and a second electrode provided on the piezoelectric layer, wherein an average grain size of crystal grains aligned in a planar direction within 15° from a (100) plane is less than the average grain size of the crystal grains facing a planar direction inclined by more than 15° from the (100) plane, in a case in which the crystal orientation of the piezoelectric layer is analyzed using an electron beam backscatter diffraction method (EBSD). |
| 地址 |
Tokyo JP |
