STAGE APPARATUS, AND CHARGED PARTICLE BEAM APPARATUS USING SAME

摘要

The purpose of the present invention is to provide a stage apparatus that effectively suppresses the transmission of heat generated by a drive mechanism to a sample, and a charged particle beam apparatus using the same. In order to achieve the purpose, there are proposed a stage apparatus and a charged particle beam apparatus. The stage apparatus comprises a table; a drive source that drives the table in a predetermined direction; a first connection member provided between the table and the drive source; a second connection member provided between the table and the drive source and closer to the drive source than the first member; a slide unit supported by the second connection member; and a rail guiding the slide unit in a predetermined direction, the first connection member comprising a member having a relatively low heat conductivity with respect to the second connection member.

主权项

1. A stage apparatus comprising:
a table on which a sample is placed; a drive source configured to drive the table in a predetermined direction; a first connection member disposed between the table and the drive source; a second connection member disposed between the table and the drive source and closer to the drive source than the first member; a slide unit supported by the second connection member or by a supported member supported by the second connection member; and a rail guiding the slide unit in the predetermined direction, wherein the first connection member comprises a relatively low heat conductivity member with respect to the second connection member.