Thermal processing by scanning a laser line beam

摘要

The thermal processing device includes a stage, a continuous wave electromagnetic radiation source, a series of lenses, a translation mechanism, a detection module, a three-dimensional auto-focus, and a computer system. The stage is configured to receive a substrate thereon. The continuous wave electromagnetic radiation source is disposed adjacent the stage, and is configured to emit continuous wave electromagnetic radiation along a path towards the substrate. The series of lenses is disposed between the continuous wave electromagnetic radiation source and the stage, and are configured to condense the continuous wave electromagnetic radiation into a line of continuous wave electromagnetic radiation on a surface of the substrate. The translation mechanism is configured to translate the stage and the line of continuous wave electromagnetic radiation relative to one another. The detection module is positioned within the path, and is configured to detect continuous wave electromagnetic radiation.

主权项

1. A laser light source, comprising:
at least one assembly which comprises laser light emitters and emits a plurality of laser light beams parallel to a first direction and spaced from each other and arranged in a first sequence along a second direction perpendicular to the first direction; and an interleave combiner receiving the laser light beams along directions parallel to the first direction and deflecting them to be parallel to the second direction and spaced from each other and arranged in a direction perpendicular to the second direction in a second sequence which differs from and is interleaved from the first sequence.