| 摘要 |
<p>The present invention prevents a decrease in quality of a gas barrier film. A roller CVD device (20) is provided with: a vacuum chamber (200) having a pair of opposing inner wall surfaces; film formation rollers (31, 32) disposed in a manner so as to form an electrical discharge space (H) therebetween and that causes a wound resin substrate (2) to be opposing with the electrical discharge space (H) therebetween; magnetic field formation devices (34, 35) that generate a magnetic field at the peripheral surface of the film formation rollers (31, 32); a plasma generation power source (33) that causes an electrical discharge at the electrical discharge space (H); a gas supply opening (36) that is disposed above the film formation space and supplies a film formation gas to the electrical discharge space (H); a gas exhaust opening (37) that is disposed at the region below the electrical discharge space (H) and that exhausts the gas of the electrical discharge space (H) to the outside of the vacuum chamber (200); and a partition wall (38) is provided upright from the bottom surface of the vacuum chamber (200) to below each film formation roller (31, 32), and that, in cooperation with the bottom wall surface of the vacuum chamber (200), encircles the space from the electrical discharge space (H) to the gas exhaust opening (37).</p> |
