| 摘要 |
An autofocus apparatus includes a light source; an optical coupler having a first port, second port and a third port; wherein the optic coupler couples to the light source at the first port; an optical collimator for directing a light output from the second port of the optical coupler onto a sample through a Dichroic mirror and a microscope objective, wherein the sample is placed on a substrate supported by an adjustable microscopy stage; a scanning device for focusing the light at a plurality of focal points along an axis; a photodiode detector for converting a reflected light signal into an intensity signal; a memory device for storing a signal template; and a microprocessor for detecting a peak in the intensity signal by cross-correlating the intensity signal with the signal template; wherein the microprocessor generates a command for moving the position of the adjustable microscopy stage along the axis. |
