AEROSOL COATING METHOD AND PLASMA-RESISTANT MEMBER FORMED THEREBY

摘要

According to an aerosol coating method, preliminary ceramic particles having a first mean particle size (D50) are subjected to a heat treatment process so as to form ceramic particles having a second mean particle size (D50) of a micro unit larger than the first mean particle size. Subsequently the ceramic particles are mixed with a carrier gas so as to form an aerosol. The aerosol is sprayed towards a base material so as to form a ceramic coating layer on the base material.