发明名称 HIGH VOLTAGE DEVICE
摘要 A method of forming a device is presented. The method includes providing a substrate having a device region which includes a source region, a gate and a drain region defined thereon. The method also includes implanting the gate. The gate comprises one or more doped portions with different dopant concentrations. A source and a drain are formed in the source region and drain region. The drain is separated from the gate on a second side of the gate and the source is adjacent to a first side of the gate.
申请公布号 US2015054076(A1) 申请公布日期 2015.02.26
申请号 US201414503424 申请日期 2014.10.01
申请人 GLOBALFOUNDRIES Singapore Pte. Ltd. 发明人 ZHANG Guowei
分类号 H01L29/78;H01L29/10;H01L29/49;H01L29/06 主分类号 H01L29/78
代理机构 代理人
主权项 1. A device comprising: a substrate having a device region, wherein the device region comprises a source region, a gate and a drain region defined thereon; a drift well disposed in the substrate between the gate and drain region, wherein the drift well encompasses the drain region and underlaps a portion of the gate and creates a gate overlap region Ogate in the drift well, wherein the gate comprises one or more doped portions with different dopant concentrations, and the gate comprises a first doped portion and a second doped portion, the interface of the first and second doped portions is at about an inner edge of the drift well; and a source and a drain in the source region and drain region, wherein the drain is separated from the gate on a second side of the gate and the source is adjacent to a first side of the gate.
地址 Singapore SG