SOLID STATE NANOPORE DEVICES AND METHODS OF MANUFACTURE

摘要

Solid state nanopore devices for nanopore applications and methods of manufacture are disclosed herein. The method includes forming a membrane layer on an underlying substrate. The method further includes forming a hole in the membrane layer. The method further comprises plugging the hole with a sacrificial material. The method further includes forming a membrane over the sacrificial material. The method further includes removing the sacrificial material within the hole and portions of the underlying substrate. The method further includes drilling an opening in the membrane, aligned with the hole.

主权项

1. A structure, comprising:
a dielectric layer on an underlying substrate; a hole in the dielectric layer and underlying substrate; and a membrane over the sacrificial plug having an opening suspended and aligned with the hole.