MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) AND RELATED ACTUATOR BUMPS, METHODS OF MANUFACTURE AND DESIGN STRUCTURES

摘要

Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming a wiring layer on a substrate comprising actuator electrodes and a contact electrode. The method further includes forming a MEMS beam above the wiring layer. The method further includes forming at least one spring attached to at least one end of the MEMS beam. The method further includes forming an array of mini-bumps between the wiring layer and the MEMS beam.

主权项

1. A MEMS structure, comprising:
a first set of wires on a substrate, comprising fixed actuator electrodes and a contact; a second set of wires above the first set of wires; at least one spring attached to at least one end of at least one of the second set of wires to accommodate a lateral shift of the second set of wires; and an array of mini-bumps between the first set of wires and the second set of wires, wherein the array of mini-bump are structured to prevent portions of the second set of wires from contacting the fixed actuator electrodes, upon actuation.