PROCESS MODULE, FABRICATING METHOD THEREOF AND SUBSTRATE PROCESSING METHOD USING THE PROCESS MODULE

摘要

Disclosed are a process module, a fabrication method thereof, and a substrate processing method using the process module. The process module includes a structure in which cell substrates are fixed on a carrier member by an adhesive according to a preset alignment standard. The fabrication method includes aligning the cell substrates according to a preset alignment standard, applying an adhesive to at least one of surfaces facing each other between the cell substrates and the carrier member, and attaching the cell substrates to the carrier member by using the adhesive. The substrate processing method includes performing the substrate processing process of the cell substrates at the same time by using the process module integrated with the cell substrates. The substrate processing method selectively includes calibrating the alignment standard for the cell substrates in the substrate processing process to an alignment state of the cell substrates in the process module.

主权项

1. A substrate processing method in which at least one substrate processing process is performed with respect to a plurality of cell substrates separated from a bare sheet, the method comprising:
fabricating a process module having a structure in which the plurality of cell substrates are attached to a carrier member in an aligned state; and performing the substrate processing process by using the fabricated process module.