摘要 |
<p>The present invention relates to a member for a gas sensor, a gas sensor using the same, and a method of manufacturing the same. More specifically, the present invention relates to a member for a gas sensor using a metal-oxide semiconductor nanostructure formed including a grown nanoparticle, a gas sensor, and a method of manufacturing the same. The present invention relates to a method of manufacturing a member for a gas sensor using a metal-oxide semiconductor nanostructure which includes steps of (a) forming a nanostructure formed of multiple metal-oxide semiconductor nanoparticles; and (b) growing the metal-oxide semiconductor nanoparticles on the nanostructure by an optical sintering process, wherein a gas pocket through which gas can enter and exit among the metal-oxide semiconductor nanoparticles is formed due to the metal-oxide semiconductor nanoparticles being grown by the optical sintering process, thereby having a high sensitivity characteristic capable of detecting infinitesimal amount of gas by a simple detection process, having excellent selectivity to detect various gases, having mechanical stability by being attached to a sensor substrate, and mass-producing a member for a gas sensor within a short time.</p> |