| 摘要 |
<p>Materials comprised of a substrate and layer materials, and a method of making the same are disclosed. The substrate can be porous, and the layer material can be selectively located in the pores. The method exposes a substrate to an amount of water or water vapor selected to substantially locate only where deposition is required such as in the pores of a porous substrate. The water then hydrolyses a precursor material. The resulting product deposits selectively where the water had located. Controlling the amount of water controls the proportion of the surface that is covered by the layer and the depth of that layer. Successive cycles can result in multiple layers to either increase the thickness of the layer or to deposit layers with different compositions. Metal oxide layers thus deposited can be subsequently converted to other compositions such as metal nitrides, carbides, phosphides and oxynitrides.</p> |
