| 摘要 |
PROBLEM TO BE SOLVED: To provide a vaporizer for an MOCVD capable of obtaining a vaporized gas in which a material solution is uniformly dispersed, and further to provide a vaporizing method of the material solution.SOLUTION: A vaporizer for an MOCVD comprises: (1) a dispersion section 8 that includes a gas inlet port 4 for introducing a pressurized carrier gas 3 into a gas passage, means for supplying a raw material solution 5a to the gas passage, and a gas outlet 7 for sending a carrier gas containing the raw material solution to a vaporization section 22; and (2) the vaporization section 22 that includes a vaporizing tube 20a of which one end is connected to a reaction tube of the MOCVD device and other end is connected to the gas outlet 7 and heating means for heating the vaporizing tube 20a, and the vaporization section 22 heats and vaporizes the carrier gas containing the raw material solution supplied from a dispersion section 8. In the vaporizer for an MOCVD, (3) the dispersion section 8 comprises: a dispersion section main body 1 that includes a cylindrical hollow section; and a rod 10 having a smaller outer diameter than an inner diameter of the cylindrical hollow section, and includes spiral grooves 70 on the evaporator 22 side of an outer periphery of the rod 10. The rod 10 is inserted through the cylindrical hollow section. |
