| 发明名称 |
SCANNING PROBE MICROSCOPE |
| 摘要 |
A scanning probe microscope includes a stage on which a sample is mounted, a probe configured to measure a characteristic of the sample, and a controller configured to move the probe and the stage relative to each other along a scanning trajectory during measurement of the characteristic of the sample. The scanning trajectory includes a plurality of linear segments, wherein each pair of adjacent linear segments form an angle that is 90 degrees or less. |
| 申请公布号 |
US2015059025(A1) |
申请公布日期 |
2015.02.26 |
| 申请号 |
US201414194465 |
申请日期 |
2014.02.28 |
| 申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
SHINOMIYA Hideo;HIROTA Jun;HARADA Kazunori;YABUKI Moto |
| 分类号 |
G01Q10/00 |
主分类号 |
G01Q10/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A scanning probe microscope comprising:
a stage on which a sample is mounted; a probe configured to measure a characteristic of the sample; and a controller configured to move the probe and the stage relative to each other along a scanning trajectory during measurement of the characteristic of the sample, the scanning trajectory including a plurality of linear segments, wherein each pair of adjacent linear segments form an angle that is 90 degrees or less. |
| 地址 |
Tokyo JP |
