rotational rate sensor having preset quadrature offset

摘要

A rotational rate sensor includes a substrate and a seismic mass situated thereon, and configured for detecting a rate of rotation about a rotation axis, the seismic mass having a second mass element coupled to a first mass element, which is drivable to a drive movement along a drive direction perpendicular to the rotation axis, the first and second mass element being deflectable along a detection direction essentially perpendicular to the drive direction and to the rotation axis, the rotational rate sensor having at least one compensating arrangement to produce a compensating force acting on the second mass element, the compensating force being oriented in a compensation direction essentially parallel to the detection direction, the at least one compensating arrangement being the only compensating arrangement and being configured exclusively to produce the compensating force oriented in the compensation direction, the rotational rate sensor being configured such that a quadrature offset force acting on the second mass element is directed exclusively in a preferred direction opposite and parallel to the compensation direction.

主权项

1. A rotational rate sensor for detecting a rotational rate about an axis of rotation, comprising:
a substrate; a seismic mass situated on the substrate, the seismic mass having a first mass element and a second mass element coupled to the first mass element, the first mass element being capable drivable to a drive movement along a drive direction perpendicular to the axis of rotation, the first mass element and the second mass element being deflectable along a detection direction essentially perpendicular both to the drive direction and to the axis of rotation; at least one compensating arrangement to produce a compensating force acting on the first mass element and/or the second mass element, the compensating force being oriented in a compensation direction essentially parallel to the detection direction; wherein the at least one compensating arrangement is the only compensating arrangement, the at least one compensating arrangement being configured exclusively to produce the compensating force oriented in the compensation direction, and/or wherein the rotational rate sensor is configured such that a quadrature offset force acting on the first mass element and/or the second mass element is directed exclusively in a preferred direction opposite and parallel to the compensation direction.