发明名称 METHOD FOR FORMING INTEGRATED CIRCUITS ON A STRAINED SEMICONDUCTOR SUBSTRATE
摘要 An electronic circuit on a strained semiconductor substrate, includes: electronic components on a first surface of a semiconductor substrate; and at least portions of a layer of a porous semiconductor material on the side of a second surface of the semiconductor substrate, opposite to the first surface, to bend the semiconductor substrate.
申请公布号 US2015054141(A1) 申请公布日期 2015.02.26
申请号 US201414533770 申请日期 2014.11.05
申请人 STMicroelectronics (Crolles 2) SAS 发明人 Bensahel Daniel-Camille;Halimaoui Aomar
分类号 H01L29/78 主分类号 H01L29/78
代理机构 代理人
主权项 1. A strained integrated device structure comprising: integrated devices formed at a first surface of a semiconductor substrate; porous semiconductor material formed at a first surface of a semiconductor support, wherein the semiconductor support is bonded to a second surface of the semiconductor substrate; and a region of strained semiconductor located between the porous semiconductor material and the integrated devices.
地址 Crolles FR