| 发明名称 |
STACKED STRUCTURE BODY AND PATTERN FORMATION METHOD |
| 摘要 |
According to one embodiment, a stacked structure body includes: an underlayer; a mask layer provided on the underlayer; a copolymer-containing layer provided on the mask layer, the copolymer-containing layer containing a metal and carbon, and the copolymer-containing layer including a first copolymer region and a second copolymer region provided on the first copolymer region, and the second copolymer region having a lower proportion of a metal concentration to a carbon concentration than the first copolymer region; and a resist pattern provided on the copolymer-containing layer. |
| 申请公布号 |
US2015056811(A1) |
申请公布日期 |
2015.02.26 |
| 申请号 |
US201414175125 |
申请日期 |
2014.02.07 |
| 申请人 |
Kabushiki Kaisha Toshiba |
发明人 |
KONDOH Takehiro;Sato Yasuhiko |
| 分类号 |
H01L21/3213;H01L21/027 |
主分类号 |
H01L21/3213 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A stacked structure body comprising:
an underlayer; a mask layer provided on the underlayer; a copolymer-containing layer provided on the mask layer, the copolymer-containing layer containing a metal and carbon, and the copolymer-containing layer including a first copolymer region and a second copolymer region provided on the first copolymer region, and the second copolymer region having a lower proportion of a metal concentration to a carbon concentration than the first copolymer region; and a resist pattern provided on the copolymer-containing layer. |
| 地址 |
Minato-ku JP |
