SUBSTRATE INSPECTION APPARATUS

摘要

The present invention relates to a substrate inspection apparatus capable of reducing inspection time and improving user convenience. The substrate inspection apparatus according to one aspect of the present invention comprises: a measuring unit measuring inspection regions according to a predetermined measurement sequence for a substrate to be inspected including a plurality of inspection regions, and obtaining image data for each inspection region; a plurality of data processing units for processing the image data, which is transferred from the measuring unit, of each inspection region; a control unit including an optimizing module for setting an optimized measurement sequence for the inspection regions and an optimized data processing sequence for the data processing units; and a user interface for displaying information related to the measurement sequence and the data processing sequence, which are optimized by the optimizing module.