发明名称 MICROWAVE FREQUENCY SETTING DEVICE, MICROWAVE FREQUENCY SETTING METHOD, AND RECORDING MEDIUM
摘要 According to a microwave frequency setting device, an additional signal source outputs an additional signal. An adder adds the additional signal to a microwave to output the microwave thus-obtained. A reflected signal measurement section measures a power of a reflected signal that is produced by reflection of an output from the adder having entered a microwave furnace, the microwave furnace being adapted to accommodate therein an object to be processed with the microwave. A local minimum frequency measurement section measures a local minimum frequency, the local minimum frequency being a frequency at which a measurement result provided by the reflected signal measurement section has a local minimum. A frequency setting section sets a frequency of the microwave to the local minimum frequency measured by the local minimum frequency measurement section. A frequency band of the additional signal includes a resonance frequency of the microwave furnace.
申请公布号 US2015053671(A1) 申请公布日期 2015.02.26
申请号 US201414445251 申请日期 2014.07.29
申请人 ADVANTEST CORPORATION 发明人 KURITA Hiroyuki
分类号 H05B6/70;H05B6/68;H05B6/64 主分类号 H05B6/70
代理机构 代理人
主权项 1. A microwave frequency setting device, comprising: an additional signal source that outputs an additional signal; an adder that adds the additional signal to a microwave to output the microwave thus-obtained; a reflected signal measurement section that measures a power of a reflected signal that is produced by reflection of an output from the adder having entered a microwave furnace, the microwave furnace being adapted to accommodate therein an object to be processed with the microwave; a local minimum frequency measurement section that measures a local minimum frequency, the local minimum frequency being a frequency at which a measurement result provided by the reflected signal measurement section has a local minimum; and a frequency setting section that sets a frequency of the microwave to the local minimum frequency measured by the local minimum frequency measurement section, wherein a frequency band of the additional signal includes a resonance frequency of the microwave furnace.
地址 Tokyo JP