| 摘要 |
To inspect a substrate, the substrate, before a component is provided on a mounter, is first transferred to a work stage. Then, the warpage of the substrate is inspected. Next, the substrate is transferred to the mounter if it is determined that the substrate is good according to the inspection result, and the substrate is confirmed as being defective without transferring the substrate to the mounter if it is determined that the substrate is defective according to the inspection result. Thus, unnecessary work can be prevented, and the productivity of a product and inspection efficiency can be increased. |
