Access Arbitration System for Semiconductor Fabrication Equipment and Methods for Using and Operating the Same

摘要

An access arbitration module includes a plurality of active component communication ports for communicating with a plurality of active components, and includes a passive component communication port for communicating with a passive component. The access arbitration module also includes switching logic defined to control transmission of access communication protocol signals between each of the plurality of active component communication ports and the passive component communication port, such that an authorized one of the plurality of active component communication ports is connected in communication with the passive component communication port at a given time, and such that non-authorized ones of the plurality of active component communication ports are prevented from communication with the passive component communication port at the given time.

主权项

1. An apparatus, comprising:
a plurality of communication interfaces, at least two of the plurality of communication interfaces defined to connect to separate container movement systems, each container movement system configured to transport a workpiece container within a semiconductor fabrication facility, at least one of the plurality of communication interfaces defined to connect to a passive component, the passive component representing a destination for one or more workpiece containers to be transported by one or more of the container movement systems; and circuitry connected to each of the plurality of communication interfaces, the circuitry defined to control transmission of signals between the plurality of communication interfaces such that each of the plurality of communication interfaces that is connected to a given passive component will receive signals from only one other of the plurality of communication interfaces at a given time.