| 摘要 |
<p>A device with a micro- or nanoscale structure representing one or more of a mechanical structure, a sensing element, an active and/or passive electrical circuitry, comprises a component (1) containing the micro-or nanoscale structure (13), and a support (2) for the component (1). The support (2) contains a recess (23). The component (1) is arranged at least partly in the recess (23). An electrically conducting structure (3) is provided for bridging a gap (6) between the component (1) and the support (2).</p> |
