| 摘要 |
In an electrostatic relay (31,101,111) in which a moving contact (56) and a movable electrode are displaced in parallel with a base substrate(32), an opening force is increased when the movable electrode is separated from a fixed electrode, and a structure is simplified to enhance a degree of freedom of design. A fixed contact portion (33) and a fixed electrode portion (35) are fixed to the base substrate (32). The fixed electrode portion (35) and a movable electrode portion (36) constitute an electrostatic actuator that displaces the movable electrode portion (36) and a moving contact portion (34). A movable spring (37a,37b) provided in a spring supporting portion (38,39) retains the movable electrode portion (36) in a displaceable manner. A cantilever secondary spring (84) is provided in the spring supporting portion (38), and a projection portion (85) is provided in a front end face of the movable electrode portion (36). The secondary spring (84) abuts on the projection portion (85) while being not deformed until abutting on the projection portion (85), before the moving contact (56) of the moving contact portion (34) abuts on the fixed contact (46a,46b) of the fixed contact portion (33) when the moving contact portion (34) and the movable electrode portion (36) are displaced. |
