发明名称 Apparatus for producing polysilicon and preparation of polysilicon using same
摘要 According to the present invention, the present invention provides an apparatus and a method for producing polysilicone including the same. The apparatus includes: a reaction pipe having a reaction gas supplying pipe on an upper surface; a reduction gas supplying pipe for supplying reduction gas in the reaction pipe; a heating body installed in the reaction pipe; a reduction gas supplying pipe for supplying reduction gas to the reaction pipe; a heating device for heating an object to be heated.
申请公布号 KR20150019641(A) 申请公布日期 2015.02.25
申请号 KR20130096730 申请日期 2013.08.14
申请人 发明人
分类号 B01J4/00;B01J19/24;C01B33/021 主分类号 B01J4/00
代理机构 代理人
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