发明名称 SYSTEM AND PROGRAM FOR GROUP MANAGEMENT
摘要 The present invention provides group management system and program capable of shortening a downtime of a manufacturing device. The group management system (1) includes a manufacturing device (30) and a server device (60). The manufacturing device (30) includes: a manufacturing device display unit configured to display information about a specified process; an acquiring unit configured to acquire information including temperatures, pressures, flow rates and electric powers of respective parts of the manufacturing device; and an acquired information transmitting unit configured to transmit the information acquired by the acquiring unit to the server device. The server device (60) includes: a storage unit configured to store the information transmitted; an analysis unit configured to analyze the information stored; and a server device display unit configured to display the information stored and information analyzed. In addition, the manufacturing device (30) includes a remote operation function unit configured to directly operate the server device display unit from the manufacturing device display unit.
申请公布号 KR20150020076(A) 申请公布日期 2015.02.25
申请号 KR20140101783 申请日期 2014.08.07
申请人 发明人
分类号 H01L21/00;H01L21/02 主分类号 H01L21/00
代理机构 代理人
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