发明名称 ワイヤソー及びワイヤソーにおけるローラ位置合わせ方法
摘要 <p>A wire saw is provided with a pair of bobbins (12A, 12B) and main rollers (13A, 13B). The wire travel path between one (12A or 12B) of the bobbins and the main rollers (13A, 13B) is provided with a dancer roller (16A or 16B), a traverse roller (17A or 17B), and a guide roller (18A or 18B), and the wire travel path between the other bobbin (12A or 12B) and the main rollers (13A, 13B) is provided with the dancer roller (16A or 16B), the traverse roller (17A or 17B), and the guide roller (18A or 18B). The traverse roller (17A or 17B), the dancer roller (16A or 16B), and the guide roller (18A or 18B) in each of the wire travel paths have a positional relationship in which the portions of a wire (11) which travel between dancer roller (16A or 16B), the traverse roller (17A or 17B), and the guide roller (18A or 18B) are on the same plane.</p>
申请公布号 JP5675462(B2) 申请公布日期 2015.02.25
申请号 JP20110074515 申请日期 2011.03.30
申请人 发明人
分类号 B24B27/06;B28D5/04;H01L21/304 主分类号 B24B27/06
代理机构 代理人
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