发明名称 Liquid ejecting head and liquid ejecting apparatus
摘要 A piezoelectric element comprises a vibration plate (50) composed of a material containing silicon; a titanium oxide layer (56) disposed on the vibration plate; a layer (57) disposed on the titanium oxide layer; a first electrode (60) disposed on the layer (57) and composed of platinum; a piezoelectric layer (70) disposed on the first electrode and composed of a piezoelectric material containing at least bismuth; a second electrode (80) which is disposed on the piezoelectric layer (70), wherein the layer (57) is a bismuth-containing layer (57) which contains bismuth and has a thickness of 10 nm or less.
申请公布号 EP2364853(B1) 申请公布日期 2015.02.25
申请号 EP20110157447 申请日期 2011.03.09
申请人 SEIKO EPSON CORPORATION 发明人 YONEMURA, TAKAYUKI;NAWANO, MASAHISA
分类号 B41J2/14;B41J2/045;B41J2/055;B41J2/135;B41J2/145;B41J2/16;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/29;H01L41/317;H01L41/43 主分类号 B41J2/14
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