发明名称 |
Liquid ejecting head and liquid ejecting apparatus |
摘要 |
A piezoelectric element comprises a vibration plate (50) composed of a material containing silicon; a titanium oxide layer (56) disposed on the vibration plate; a layer (57) disposed on the titanium oxide layer; a first electrode (60) disposed on the layer (57) and composed of platinum; a piezoelectric layer (70) disposed on the first electrode and composed of a piezoelectric material containing at least bismuth; a second electrode (80) which is disposed on the piezoelectric layer (70), wherein the layer (57) is a bismuth-containing layer (57) which contains bismuth and has a thickness of 10 nm or less. |
申请公布号 |
EP2364853(B1) |
申请公布日期 |
2015.02.25 |
申请号 |
EP20110157447 |
申请日期 |
2011.03.09 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
YONEMURA, TAKAYUKI;NAWANO, MASAHISA |
分类号 |
B41J2/14;B41J2/045;B41J2/055;B41J2/135;B41J2/145;B41J2/16;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/29;H01L41/317;H01L41/43 |
主分类号 |
B41J2/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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