发明名称 |
SEMICONDUCTOR OPTICAL ELEMENT ARRAY AND MANUFACTURING METHOD THEREFORE |
摘要 |
The present invention provides a semiconductor optical element array including: a semiconductor substrate having a main surface in which a plurality of concave portions is formed; a mask pattern that is formed on the main surface of the semiconductor substrate and includes a plurality of opening portions provided immediately above the plurality of concave portions; a plurality of fine columnar crystals that is made of a group-III nitride semiconductor grown from the plurality of concave portions to the upper side of the mask pattern through the plurality of opening portions; an active layer that is grown on each of the plurality of fine columnar crystals; and a semiconductor layer covering each of the active layers. |
申请公布号 |
EP2333847(A4) |
申请公布日期 |
2015.02.25 |
申请号 |
EP20090809577 |
申请日期 |
2009.08.27 |
申请人 |
SOPHIA SCHOOL CORPORATION |
发明人 |
KISHINO, KATSUMI;KIKUCHI, AKIHIKO;SEKIGUCHI, HIROTO |
分类号 |
H01L33/18;H01L21/02;H01L21/205;H01L31/0352;H01L31/075;H01L33/24;H01S5/343 |
主分类号 |
H01L33/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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