Method for processing and/or for observing an object, and particle beam device for carrying out the method

摘要

The invention relates to a method for processing and/or observing an object (16) by means of at least one particle beam, in which the particle beam is scanned over the object (16). The method comprises: determining a scan region (RB1) on the object (16), the scan region (RB1) having a multiplicity of scan lines (RZ1 to RZ4), moving the particle beam in a first scanning direction (A) along one of the multiplicity of scan lines (RZ1 to RZ4), and changing from the first scanning direction (A) to a second scanning direction (A') at a change-of-direction time, wherein changing from the first scanning direction (A) to the second scanning direction (A') comprises a setting of a point of rotation (P1) in that scan line (RZ4) of the scan region (RB1) in which the particle beam is situated at the change-of-direction time, with an axis of rotation (A1) extending through the point of rotation (P1), and wherein the first scanning direction (A) is changed into the second scanning direction (A') by rotating the scan region (RB1) about the axis of rotation (A1), with the point of rotation (P1) being selected dependent on the direction of rotation.