发明名称 Piezoresistive pressure sensor device
摘要 The voltages output from a low-pressure MEMS sensor are increased by increasing the sensitivity of the sensor. Sensitivity is increased by thinning the diaphragm of the low pressure sensor device. Nonlinearity increased by thinning the diaphragm is reduced by simultaneously creating a cross stiffener on the top side of the diaphragm. An over-etch of the top side further increases sensitivity.
申请公布号 GB201500472(D0) 申请公布日期 2015.02.25
申请号 GB20150000472 申请日期 2015.01.12
申请人 CONTINENTAL AUTOMOTIVE SYSTEMS US, INC. 发明人
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