发明名称 |
Epitaxial oxide film, piezoelectric film, piezoelectric film element, liquid discharge head using the piezoelectric film element, and liquid discharge apparatus |
摘要 |
<p>Provided are a piezoelectric film, a piezoelectric film element, a liquid discharge head using the piezoelectric film element, and a liquid discharge apparatus. A piezoelectric film element that can be suitably used for a discharge pressure-generating element of a liquid discharge head is obtained by using an epitaxial oxide film composed of a perovskite composite oxide constituted according to a general formula ABO 3 as a piezoelectric film. The epitaxial oxide film has at least an A domain and a B domain having a crystal orientation deviation with respect to each other. The crystal orientation deviation between the A domain and the B domain is less than 2.</p> |
申请公布号 |
EP2549558(B1) |
申请公布日期 |
2015.02.25 |
申请号 |
EP20120188537 |
申请日期 |
2006.09.05 |
申请人 |
CANON KABUSHIKI KAISHA;TOKYO INSTITUTE OF TECHNOLOGY |
发明人 |
IFUKU, TOSHIHIRO;AOKI, KATSUMI;MATSUDA, TAKANORI;FUNAKUBO, HIROSHI;YOKOYAMA, SHINTARO;KIM, YONG KWAN;NAKAKI, HIROSHI;IKARIYAMA, RIKYU |
分类号 |
H01L41/187;B41J2/045;B41J2/055;B41J2/135;B41J2/14;B41J2/16;C30B29/22;C30B29/30;C30B29/32;H01L41/08;H01L41/09;H01L41/18;H01L41/316 |
主分类号 |
H01L41/187 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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