发明名称 パターニングされた半導体膜を形成する方法
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method of patterning a semiconductor film in manufacturing of a transistor array which is used in a display device. <P>SOLUTION: A method of manufacturing a transistor includes a step for providing a substrate, a step for providing a gate electrode contiguous to the substrate, a step for providing a gate dielectric contiguous to the substrate and the gate electrode, a step for providing a source electrode and a drain electrode contiguous to the gate dielectric, a step for providing a mask contiguous to the gate dielectric in such a pattern as the source electrode, the drain electrode and a part of the gate dielectric remain exposed, and a step for providing a semiconductor layer containing an organic semiconductor and one of multiple inorganic colloidal particles contiguously to the source electrode, the drain electrode, a part of the gate dielectric, and the mask. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5677266(B2) 申请公布日期 2015.02.25
申请号 JP20110241694 申请日期 2011.11.02
申请人 发明人
分类号 H01L21/336;G02F1/1368;G02F1/167;G09F9/30;H01L29/786 主分类号 H01L21/336
代理机构 代理人
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