发明名称 表示装置
摘要 <p>A reduction in contaminating impurities in a TFT, and a TFT which is reliable, is obtained in a semiconductor device which uses the TFT. By removing contaminating impurities residing in a film interface of the TFT using a solution containing fluorine, a reliable TFT can be obtained.</p>
申请公布号 JP5674883(B2) 申请公布日期 2015.02.25
申请号 JP20130170964 申请日期 2013.08.21
申请人 发明人
分类号 H01L21/336;H01L29/786;H01L51/50 主分类号 H01L21/336
代理机构 代理人
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