| 摘要 |
<P>PROBLEM TO BE SOLVED: To form a small-width pattern in a large thickness, and to prevent a surface thereof in its intersection part from becoming uneven when forming the small-width pattern and a large-width pattern intersecting with each other. <P>SOLUTION: The method for forming a pattern includes a first application step S30 for linearly supplying a high-viscosity application liquid to a principal surface of a substrate to form a small-width pattern, and a second application step S50 for linearly supplying a low-viscosity application liquid onto the principal surface of the substrate and the small-width pattern to form a large-width pattern intersecting with the small-width pattern. <P>COPYRIGHT: (C)2011,JPO&INPIT |
