发明名称 |
APPARATUS AND METHOD FOR SYNCHRONIZING SAMPLE STAGE MOTION WITH A TIME DELAY INTEGRATION CHARGE-COUPLE DEVICE IN A SEMICONDUCTOR INSPECTION TOOL |
摘要 |
<p>A method for synchronizing sample stage motion with a time delay integration (TDI) charge-couple device (CCD) in a semiconductor inspection tool, including: measuring a lateral position of a stage holding a sample being inspected; measuring a vertical position of the stage; determining a corrected lateral position of an imaged pixel of the sample based on the measured lateral and vertical positions; and synchronizing charge transfer of the TDI CCD with the corrected lateral position of the imaged pixel.</p> |
申请公布号 |
EP2839505(A1) |
申请公布日期 |
2015.02.25 |
申请号 |
EP20130777897 |
申请日期 |
2013.04.15 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
SUBRAHMANYAN, PRADEEP;WACK, DANIEL;WRIGHT, MICHAEL;ALLES, DAVID |
分类号 |
H01L21/68;H01L21/66 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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