ジルコニア強化アルミナのＥＳＤ保護用セラミック組成物、部材及びそれを形成するための方法

摘要

ESD safe ceramic component is provided which includes a sintered composition which is formed of a base material and a resistivity modifier. The base material includes a primary component and a secondary component, the primary component including Al₂O₃ and the secondary component including tetragonal-ZrO₂.