申请人 |
MARUBUN CORPORATION;TOSHIBA KIKAI KABUSHIKI KAISHA;RIKEN;ULVAC, INC. |
发明人 |
KASHIMA, YUKIO;MATSUURA, ERIKO;NISHIHARA, HIROMI;TASHIRO, TAKAHARU;OOKAWA, TAKAFUMI;HIRAYAMA, HIDEKI;FUJIKAWA, SACHIE;YOUN, SUNG WON;TAKAGI, HIDEKI;KAMIMURA, RYUICHIRO;OSADA, YAMATO |