发明名称 METHOD FOR MANUFACTURING INSULATING LAYER
摘要 <p>Provided is a method for manufacturing an insulation layer which includes the steps of: spraying a composition which includes a polysiloxazane hydroxide or a polysilazane hydroxide and a solvent on a substrate; processing a layer obtained after emitting UV on the composition under constant temperature and humidity conditions; and thermally processing the result at 200 to 700 degrees centigrade.</p>
申请公布号 KR20150019949(A) 申请公布日期 2015.02.25
申请号 KR20130097456 申请日期 2013.08.16
申请人 发明人
分类号 H01L21/312;H01L21/8247;H01L27/115 主分类号 H01L21/312
代理机构 代理人
主权项
地址