| 主权项 |
1. A radio frequency biosensor chip having nanometer structures comprising:
an isolated substrate; a ground plane deposited at a rear surface of the isolated substrate through a semiconductor process; a ring resonator deposited on the isolated substrate through the semiconductor process, wherein the ring resonator is operated at an operating frequency of 10 GHz, wherein a physical length of the ring resonator itself is a full guided wavelength; a first signal input/output port and a second signal input/output port connected to the ring resonator, wherein a distance between the first signal input/output port and the second signal input/output port is ninety-degree electrical length when the ring resonator is operated at an operating frequency of 10 GHz; a perturbed structure having an electrical length and being disposed adjacent to an inner edge of the ring resonator to form at least one cell detection area for receiving a test cell and allow electromagnetic wave advancing discontinuously for activating a resonant frequency and generating a passband, wherein a circuit structure, which is a combination of the ring resonator and the perturbed structure, is symmetrical, wherein a distance between the perturbed structure and the first signal input/output port and a distance between the perturbed structure and the second signal input/output port are 135-degree electrical length, wherein the perturbed structure has an equivalent capacitance which is taken as the cell detection area, wherein the center frequency of the passband is determined by the electrical length of the perturbed structure; a plurality of nanometer structures formed on the perturbed structure, wherein each of the nanometer structures is a column or a cone structure with a height between 100 nm and 5000 nm and a diameter between 10 nm and 500 nm, wherein a frequency response of the circuit structure is formed when a measurement scope of the radio frequency biosensor chip is between 0.045 and 50 GHz by using the first signal input/output port and the second signal input/output port, wherein when the nanometer structures pierce through the test cell, the equivalent capacitance of the perturbed structure is changed, and the electromagnetic wave with a frequency of 10 GHz is transmitted from the ring resonator into the test cell via the nanometer structures for deteriorating the test cell; and a protection layer coated on the ring resonator and the isolated substrate, the protection layer defining openings on the cell detection area, the first signal input/output port and the second signal input/output port. |
