| 发明名称 |
Wiresaw cutting method |
| 摘要 |
The present invention provides a wiresaw cutting method comprising cutting a workpiece with a wiresaw while applying an aqueous cutting fluid to the wiresaw from a recirculating reservoir of cutting fluid, monitoring at least one of a chemical property, a physical property, or both, and adjusting the chemical composition of the cutting fluid while cutting the workpiece to maintain the property being monitored. The present invention additionally provides an apparatus to perform the inventive method. |
| 申请公布号 |
US8960177(B2) |
申请公布日期 |
2015.02.24 |
| 申请号 |
US200913139017 |
申请日期 |
2009.12.21 |
| 申请人 |
Cabot Microelectronics Corporation |
发明人 |
Grumbine Steven;Naguib Sant Nevin |
| 分类号 |
B28D1/08;B28D5/04;B28D5/00;C09K3/14 |
主分类号 |
B28D1/08 |
| 代理机构 |
|
代理人 |
Omholt Thomas E;Ross Robert J;Hornilla Arlene |
| 主权项 |
1. A wiresaw cutting method comprising,
cutting a workpiece with a wiresaw while applying an aqueous cutting fluid to the wiresaw from a recirculating reservoir of cutting fluid; monitoring a chemical and/or a physical property of the cutting fluid while cutting the workpiece; and adjusting the chemical composition of the cutting fluid to maintain or restore the level of the property being monitored within predetermined limits. |
| 地址 |
Aurora IL US |
